Door: CN Rood As semiconductor technology continues to push boundaries, the demand for accurate and reliable over-temperature characterization techniques becomes paramount. In this technical paper, we delve into the challenges of over-temperature characterization and present innovative solutions that address these challenges. Leveraging the capabilities of Anritsu VectorStar ME7838G 70 kHz–220 GHz broadband VNA, we have developed cutting edge hardware and software solutions for on-wafer broadband characterization.
This paper showcases our industry-first 220 GHz TITAN™ Probe and it highlights the capabilities of SENTIO® and QAlibria® prober control and calibration software, respectively. The integrated solution enabled automated on-wafer system calibration with NIST multiline TRL and MPI’s TMRR calibration and precise broadband device characterization over a wide range of temperatures. Through detailed examples of InP HBT device under test (DUT) characteristics, we demonstrate the effectiveness and reliability of our solutions.
