On-Wafer RF probe tip calibrations are established over 30 years in the industry. Nevertheless, new applications are often challenging and requires new approaches for the test engineer.
Some calibration algorithms are sensitive to probe placement and overtravel an inaccurate positioning can result in limited accuracy of calibrations and respective in measurements. Alignment marks on commercial calibration substrates are often misleading in interpretation of correct probe placement. AR (augmented reality) tools are state of the art to help users. An augmented probe align tool is now available.
Antenna measurements in the THz range are challenging due to the requirement of a 1-port calibration. Calibration substrates for this frequency range are designed for the TRL calibration method which requires 2 probes. SOL standards are not available. The Least Square Calibration method is a possible approach to overcome this problem.
Devices with differential to single-ended conversion brings calibration challenges to the measurement engineer. Second Tier calibration methods are very helpful in such situations. This will we demonstrated on an application example.
Ruben Zowada , Lead Staff Applications Engineer at FormFactor (on behalf of Microtron)
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